| 000 | 00877cam a2200253 i 4500 | ||
|---|---|---|---|
| 001 | u50132 | ||
| 003 | SIRSI | ||
| 005 | 20240619150405.0 | ||
| 008 | 110131 eng | ||
| 020 | _a1903996473 | ||
| 050 |
_aTK7875 _b.M52 2003 |
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| 245 | 0 | 0 |
_aMicrosystems technology : _bfabrication, test and reliability / _cedited by Jumana Boussey. |
| 264 | 1 |
_aLondon : _bKogan Page Science, _c2003. |
|
| 300 |
_avi, 295 pages : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aMicroelectromechanical systems. _93145 |
|
| 700 | 1 |
_aBoussey, Jumana. _9154809 |
|
| 907 |
_a.b10518290 _b07-11-22 _c01-01-19 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c43186 _d43186 |
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