| 000 | 00994cam a2200289 i 4500 | ||
|---|---|---|---|
| 001 | u60105 | ||
| 003 | SIRSI | ||
| 005 | 20240619150430.0 | ||
| 008 | 110131 1993 eng | ||
| 020 | _a0306443600 | ||
| 050 |
_aTK7871.85 _b.E53 1993 |
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| 245 | 0 | 0 |
_aElectron beam testing technology / _cedited by John T. L. Thong. |
| 264 | 1 |
_aNew York : _bPlenum Press, _c1993. |
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| 300 |
_axvi, 462 pages : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 490 | 1 | _aMicrodevices | |
| 596 | _a1 3 | ||
| 650 | 0 |
_aSemiconductors _xTesting. _93882 |
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| 650 | 0 |
_aElectron beams _xIndustrial applications. _950376 |
|
| 650 | 0 |
_aScanning electron microscopes. _932523 |
|
| 700 | 1 |
_aThong, John T. L. _9167088 |
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| 907 |
_a.b1052938x _b07-11-22 _c01-01-19 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c44294 _d44294 |
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