| 000 | 00963cam a2200277 i 4500 | ||
|---|---|---|---|
| 001 | u66946 | ||
| 003 | SIRSI | ||
| 005 | 20240619150444.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0750309768 | ||
| 050 |
_aTA2020 _b.M34 2006 |
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| 100 | 1 |
_aMakabe, T.. , _eauthor _9174748 |
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| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cT. Makabe, Z. Petrovic. |
| 264 | 1 |
_aBoca Raton, FL : _bTaylor and Francis, _c2006. |
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| 300 |
_a339 pages : _billustrations ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 490 | 1 | _aSeries in plasma physics | |
| 596 | _a1 3 | ||
| 650 | 0 |
_aPlasma engineering. _925709 |
|
| 700 | 1 |
_aPetrovic, Z. _9174749 |
|
| 907 |
_a.b10535858 _b07-11-22 _c01-01-19 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c44941 _d44941 |
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