| 000 | 00841cam a22002654i 4500 | ||
|---|---|---|---|
| 001 | u132687 | ||
| 003 | SIRSI | ||
| 005 | 20240619145008.0 | ||
| 008 | 101203s2011 enka b 001 0 eng | ||
| 020 | _a9781848212114 | ||
| 020 | _a1848212119 | ||
| 050 | 1 | 4 |
_aTK7872.M3 _b.N36 2011 |
| 245 | 1 | 0 |
_aNano-lithography / _cedited by Stefan Landis. |
| 264 | 1 |
_aHoboken, NJ : _bWiley, _c2011. |
|
| 300 |
_axxv, 325 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 596 | _a1 3 | ||
| 650 | 0 |
_aNanolithography. _952337 |
|
| 700 | 1 |
_aLandis, Stefan. _926814 |
|
| 907 |
_a.b10083807 _b07-11-22 _c15-03-18 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _genk _h0 |
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| 999 |
_c5026 _d5026 |
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