| 000 | 01304cam a2200385 i 4500 | ||
|---|---|---|---|
| 001 | u95548 | ||
| 003 | SIRSI | ||
| 005 | 20240619150743.0 | ||
| 008 | 210907t2007 gw a b 001 0 eng d | ||
| 020 |
_a3527406336 _q(hardcover) |
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| 020 | _a9783527406333 | ||
| 040 |
_beng _erda _dSFPAGOH |
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| 050 |
_aTA418.9.N35 _b.O57 2007 |
||
| 100 | 1 |
_aOstrikov, Ken. , _eauthor _9209516 |
|
| 245 | 1 | 0 |
_aPlasma-aided nanofabrication : _bfrom plasma sources to nanoassembly / _cKen Ostrikov, Shuyan Xu. |
| 264 |
_aWeinheim : _bJohn Wiley, _c2007. |
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| 264 | 1 | _c©2007 | |
| 300 |
_axiii, 300 pages : _billustrations (some color) ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 504 | _aIncludes index and bibliographical references | ||
| 596 | _a1 4 | ||
| 650 | 0 |
_aNanostructured materials. _97519 |
|
| 650 | 0 |
_aPlasma engineering. _925709 |
|
| 650 | 0 |
_aManufacturing processes. _91356 |
|
| 650 | 0 |
_aLow temperature plasmas. _925710 |
|
| 700 | 1 |
_aXu, Shuyan. _9209517 |
|
| 907 |
_a.b10615064 _b07-09-21 _c06-04-21 |
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| 998 |
_am _b07-09-21 _cm _da _e- _feng _ggw _h0 |
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| 999 |
_c52834 _d52834 |
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