| 000 | 01031cam a2200277 i 4500 | ||
|---|---|---|---|
| 001 | u66146 | ||
| 003 | SIRSI | ||
| 005 | 20240619145127.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0071445595 | ||
| 050 |
_aTK7871.85 _b.S45 2005 |
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| 245 | 0 | 0 |
_aSemiconductor manufacturing handbook / _ceditor in chief, Hwaiyu Geng. |
| 264 | 1 |
_aNew York : _bMcGraw-Hill, _c2005. |
|
| 300 |
_a1 volume (various pagings) : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 490 | 1 | _aMcGraw-Hill handbooks | |
| 596 | _a1 3 | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, Manuals, etc. _93882 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _vHandbooks, Manuals, etc. _9170 |
|
| 700 | 1 |
_aGeng, Hwaiyu. _9173818 |
|
| 907 |
_a.b10143348 _b07-11-22 _c15-03-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c8414 _d8414 |
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