| 000 | 01076cam a2200289 i 4500 | ||
|---|---|---|---|
| 001 | u66947 | ||
| 003 | SIRSI | ||
| 005 | 20240619145128.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0471784060 | ||
| 050 |
_aTK7871.85 _b.M394 2006 |
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| 100 | 1 |
_aMay, Gary S. , _eauthor _9143688 |
|
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
| 264 | 1 |
_aHoboken, NJ : _bJohn Wiley, _c2006. |
|
| 300 |
_axviii, 463 pages : _billustrations ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _93882 |
|
| 650 | 0 |
_aOntegrated circuits _xDesign and construction. _9174750 |
|
| 650 | 0 |
_aProcess control _xStatistical methods. _9227 |
|
| 700 | 1 |
_aSpanos, Costas J. _9174751 |
|
| 907 |
_a.b10144237 _b07-11-22 _c15-03-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c8473 _d8473 |
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