| 000 | 00985cam a2200277 i 4500 | ||
|---|---|---|---|
| 001 | u72530 | ||
| 003 | SIRSI | ||
| 005 | 20240619145133.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0071455566 | ||
| 050 |
_aTK7870.15 _b.G55 2005 |
||
| 100 | 1 |
_aGilleo, Ken. , _eauthor _9125494 |
|
| 245 | 1 | 0 |
_aMEMS/MOEMS packaging : _bconcepts, designs, materials and processes / _cKen Gilleo. |
| 264 | 1 |
_aNew York : _bMcGraw-Hill, _c2005. |
|
| 300 |
_axiii, 220 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 490 | 1 | _aMcGraw-Hill nanoscience and technology series | |
| 596 | _a1 3 | ||
| 650 | 0 |
_aMicroelectronic packaging. _924050 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _93145 |
|
| 907 |
_a.b10148346 _b07-11-22 _c15-03-18 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c8682 _d8682 |
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