| 000 | 01370cam a2200313 i 4500 | ||
|---|---|---|---|
| 001 | u97383 | ||
| 003 | SIRSI | ||
| 005 | 20240619145202.0 | ||
| 008 | 110131 eng | ||
| 020 |
_a9783908451433 _qpbk. |
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| 020 |
_a3908451434 _qpbk. |
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| 050 |
_aTK7871.85 _b.G47 2008 |
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| 245 | 0 | 0 |
_aGettering and defect engineering in semiconductor technology XII : _bGADEST 2007 : Proceedings of the 12th International Autumn Meeting EMFCSC, Erice, Italy : October 14-19, 2007 / _cedited by, A. Cavallini ... [and others]. |
| 264 | 1 |
_aZurich : _bTrans Tech, _c2008. |
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| 300 |
_axv, 642 pages : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aSemiconductors _vCongresses. _93882 |
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| 650 | 0 |
_aGetters _vCongresses. _912068 |
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| 650 | 0 |
_aSilicon crystals _xDefects _vCongresses. _9211715 |
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| 650 | 0 |
_aElectrical engineering _xMaterials _vCongresses. _93003 |
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| 700 | 1 |
_aCavallini, A. _9211716 |
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| 711 | 2 |
_aInternational Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" _n(12th : _d2007 : _cErice, Italy) ) _9211717 |
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| 907 |
_a.b10171460 _b07-11-22 _c15-03-18 |
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_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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