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Handbook of plasma processing technology : fundamentals, etching, deposition and surface interactions /

Handbook of plasma processing technology : fundamentals, etching, deposition and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood. - xxiii, 523 pages : illustrations ; 25 cm. - Materials science and process technology series .

ISBN: 9780815512202 0815512201

Subjects--Topical Terms:
Plasma engineering.
Semiconductors --Etching.
Plasma etching.

LC Class. No.: TA2020 / .H36 1990

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