Handbook of plasma processing technology : (Record no. 32995)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01229cam a2200325 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | u85498 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SIRSI |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20240619150022.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 110131 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780815512202 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0815512201 |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA2020 |
| Item number | .H36 1990 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of plasma processing technology : |
| Remainder of title | fundamentals, etching, deposition and surface interactions / |
| Statement of responsibility, etc. | edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | New York : |
| Name of producer, publisher, distributor, manufacturer | Noyes Publications, |
| Date of production, publication, distribution, manufacture, or copyright notice | 1990. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxiii, 523 pages : |
| Other physical details | illustrations ; |
| Dimensions | 25 cm. |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | unmediated |
| Media type code | n |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | volume |
| Carrier type code | nc |
| Source | rdacarrier |
| 490 1# - SERIES STATEMENT | |
| Series statement | Materials science and process technology series |
| 596 ## - | |
| -- | 1 3 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma engineering. |
| 9 (RLIN) | 25709 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Etching. |
| 9 (RLIN) | 3882 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma etching. |
| 9 (RLIN) | 19633 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Rossnagel, Stephen M. |
| 9 (RLIN) | 197366 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Cuomo, Jerome J. |
| 9 (RLIN) | 197367 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Westwood, William D. |
| 9 (RLIN) | 197368 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10416341 |
| b | 07-11-22 |
| c | 28-11-18 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| -- | m |
| Operator's initials, OID (RLIN) | 06-11-22 |
| Cataloger's initials, CIN (RLIN) | m |
| First date, FD (RLIN) | a |
| -- | - |
| -- | eng |
| -- | |
| -- | 0 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | Main Library General | 18/06/2024 | TA2020 .H36 1990 | 1000207058 | 18/06/2024 | 18/06/2024 | Books - Printed |