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Plasma processes for semiconductor fabrication /

Hitchon, W. Nicholas G. ,

Plasma processes for semiconductor fabrication / W. N. G. Hitchon. - ix, 221 pages : illustrations ; 26 cm. - Cambridge studies in semiconductor physics and microelectronic engineering ; 8 .

ISBN: 0521018005

Subjects--Topical Terms:
Semiconductors --Etching.
Plasma etching.

LC Class. No.: TK7871.85 / .H57 1999

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