Plasma processes for semiconductor fabrication / (Record no. 44733)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01018cam a2200277 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | u65585 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SIRSI |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20240619150440.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 110131 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0521018005 |
| Qualifying information | pbk. |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | .H57 1999 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hitchon, W. Nicholas G. , |
| Relator term | author |
| 9 (RLIN) | 173187 |
| 245 10 - TITLE STATEMENT | |
| Title | Plasma processes for semiconductor fabrication / |
| Statement of responsibility, etc. | W. N. G. Hitchon. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | London : |
| Name of producer, publisher, distributor, manufacturer | Cambridge University Press, |
| Date of production, publication, distribution, manufacture, or copyright notice | 1999. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 221 pages : |
| Other physical details | illustrations ; |
| Dimensions | 26 cm. |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | unmediated |
| Media type code | n |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | volume |
| Carrier type code | nc |
| Source | rdacarrier |
| 490 1# - SERIES STATEMENT | |
| Series statement | Cambridge studies in semiconductor physics and microelectronic engineering ; |
| Volume/sequential designation | 8 |
| 596 ## - | |
| -- | 1 3 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Etching. |
| 9 (RLIN) | 3882 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma etching. |
| 9 (RLIN) | 19633 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10533771 |
| b | 07-11-22 |
| c | 01-01-19 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| -- | m |
| Operator's initials, OID (RLIN) | 06-11-22 |
| Cataloger's initials, CIN (RLIN) | m |
| First date, FD (RLIN) | a |
| -- | - |
| -- | eng |
| -- | |
| -- | 0 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | Main Library General | 18/06/2024 | TK7871.85 .H57 1999 | 1000187996 | 18/06/2024 | 18/06/2024 | Books - Printed |