Multi-wafer rotating MEMS machines : turbines, generators and engines / edited by Jeffrey Lang.

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TextSeries: Publisher: New York : Springer, 2009Description: xv, 456 pages : illustrations ; 24 cmContent type:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books - Printed	PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General	TK7875 .M84 2009 (Browse shelf(Opens below))	Available		1000242335

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Previous	TK7875 .M52 2012 Micro and smart systems : technology and modeling /	TK7875 .M53 2005 Micro-optomechatronics /	TK7875 .M59 2011 Mems linear and nonlinear statics and dynamics /	TK7875 .M84 2009 Multi-wafer rotating MEMS machines : turbines, generators and engines /	TK7875 .N45 2009 NEMS/MEMS technology and devices : selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July, Singapore /	TK7875 .P76 2012 Properties and processes at the nanoscale : nanomechanics of material behavior : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /	TK7875 .R42 2008 Reliability of MEMS /	Next