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Handbook of plasma processing technology : fundamentals, etching, deposition and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.

Contributor(s): Material type: TextTextSeries: Publisher: New York : Noyes Publications, 1990Description: xxiii, 523 pages : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9780815512202
  • 0815512201
Subject(s): LOC classification:
  • TA2020  .H36 1990
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Holdings
Item type Current library Call number Status Date due Barcode
Books - Printed PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General TA2020 .H36 1990 (Browse shelf(Opens below)) Available 1000207058

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