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Plasma processes for semiconductor fabrication / W. N. G. Hitchon.

By: Material type: TextTextSeries: Publisher: London : Cambridge University Press, 1999Description: ix, 221 pages : illustrations ; 26 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 0521018005
Subject(s): LOC classification:
  • TK7871.85  .H57 1999
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Holdings
Item type Current library Call number Status Date due Barcode
Books - Printed PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General TK7871.85 .H57 1999 (Browse shelf(Opens below)) Available 1000187996

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